Rotating cylindrical magnetron sputtering: Simulation of the reactive process: Journal of Applied Physics: Vol 107, No 11
Basic principles of a DC MSS with single cylindrical magnetron. (a)... | Download Scientific Diagram
US, Department of Energy
Coatings | Free Full-Text | Controlling Film Thickness Distribution by Magnetron Sputtering with Rotation and Revolution
VSim For Simulating magnetron sputtering | Tech-X Corporation
Comparative study of discharge characteristics and associated film growth for post-cathode and inverted cylindrical magnetron sputtering | SpringerLink
Sputtering Magnetron Design – Custom Circular Linear Cylindrical Magnetron Designs
Planar Target - an overview | ScienceDirect Topics
Magnetron sputtering
Magnetron sputtering sources in the cylindrical configuration. (a)... | Download Scientific Diagram
Movable cylindrical magnetron sputtering source
4 The magnetron sputter head in more detail. A cylindrical magnetic... | Download Scientific Diagram
Plasma | Free Full-Text | An Inverted Magnetron Operating in HiPIMS Mode